Thermal measuring and testing – Temperature measurement – Nonelectrical – nonmagnetic – or nonmechanical temperature...
Reexamination Certificate
2005-03-22
2005-03-22
Fulton, Christopher W. (Department: 2859)
Thermal measuring and testing
Temperature measurement
Nonelectrical, nonmagnetic, or nonmechanical temperature...
C374S005000, C374S021000
Reexamination Certificate
active
06869215
ABSTRACT:
A method and apparatus for detecting contaminants in an ion-implanted wafer by annealing and activating the ion-implanted wafer by heating or charging or both, and measuring the thermal wave absorbance generated from the activated wafer.
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Choi Sun-Yong
Chon Sang-Mun
Eom Tae-Min
Jun Chung Sam
Kim Park-Song
Gonzalez Madeline
Samsung Electrics Co. LTD
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