4. Coating apparatus
  5. Work holders, or handling devices

Kun-Hyung Lee

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Apparatus and method for processing wafers

Fluent material handling – with receiver or receiver coacting mea – Processes – With material treatment
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Cassette table of a semiconductor fabricating apparatus

Coating apparatus – Work holders – or handling devices
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Heat treatment equipment

Heating – Heating or heat retaining work chamber structure – Having expansion relieving or absorbing means
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Semiconductor wet etchant and method of forming...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Sensitive substance and surface acoustic wave gas sensor...

Measuring and testing – Gas analysis – By vibration
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Profile ID: LFUS-PAI-P-2738386

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