Apparatus and method for processing wafers

Details Apparatus and method for processing wafers Apparatus and method for processing wafers

2008-07-15

2008-07-15

Maust, Timothy L (Department: 3751)

Fluent material handling, with receiver or receiver coacting mea

Processes

With material treatment

C141S066000, C141S069000, C141S089000, C141S098000, C414S217100, C414S940000

Reexamination Certificate

active

11292674

ABSTRACT:
An apparatus and method for manufacturing semiconductor devices are disclosed. In accordance with the invention, a wafer transfer device for transferring wafers from wafer storage containers to wafer processing equipment includes a flow chamber designed to reduce the amount of contaminants that can enter the wafer container. The wafer transfer apparatus provide two gas inlets for allowing two gases to flow through the flow chamber of the transfer apparatus. This results in a reduced amount of contaminants able to enter the wafer container, which in turn results in manufacture of devices with more reliable performance characteristics as well as high manufacturing yield.

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