Heat treatment equipment

Details Heat treatment equipment Heat treatment equipment

2007-07-10

2010-12-14

Wilson, Gregory A (Department: 3749)

Heating

Heating or heat retaining work chamber structure

Having expansion relieving or absorbing means

C219S390000, C118S733000

Reexamination Certificate

active

07850449

ABSTRACT:
In an embodiment, heat treatment equipment comprises a process tube, an exhaust duct connected to the process tube, and, during operation, exhausting gases present within the process tube. The heat treatment equipment also comprises a hollow pressure control member interposed between the process tube and the exhaust duct, the pressure control member being operatively connected to the process tube and the exhaust duct respectively, and including one or a number of openings. Negative pressure is avoided in the process tube during heat treatment processes so that unwanted gas and impurities cannot enter the process tube from outside.

REFERENCES:
patent: 5360336 (1994-11-01), Monoe
patent: 5458685 (1995-10-01), Hasebe et al.
patent: 5578132 (1996-11-01), Yamaga et al.
patent: 5813851 (1998-09-01), Nakao
patent: 6000935 (1999-12-01), Regimand et al.
patent: 6159298 (2000-12-01), Saito
patent: 7044731 (2006-05-01), Saito
patent: 2003/0221623 (2003-12-01), Shima et al.
patent: 2001-60555 (2001-03-01), None
patent: 2001-148379 (2001-05-01), None
patent: 2003-45867 (2003-02-01), None
patent: 2005-286051 (2005-10-01), None
patent: 10-2005-0036550 (2005-04-01), None
patent: 10-2006-0084554 (2006-07-01), None
English language abstract of Japanese Publication No. 2001-148379.
English language abstract of Korean Publication No. 10-2005-0036550.
English language abstract of Japanese Publication No. 2005-286051.

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