4. Electricity: electrical systems and devices
  5. Electric charge generating or conducting means
  6. Use of forces of electric charge or field

Kuang-Han Ke

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Apparatus for improving wafer and chuck edge protection

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Diagnostic pedestal assembly for a semiconductor wafer processin

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Magnetically-enhanced plasma chamber with non-uniform magnetic f

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Shield or ring surrounding semiconductor workpiece in plasma...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With mechanical mask – shield or shutter for shielding workpiece
Reexamination Certificate

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Shield or ring surrounding semiconductor workpiece in plasma...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-864080

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