4. Coating apparatus
  5. Control means responsive to a randomly occurring sensed...
  6. Responsive to condition of coating material

Kousou Fujino

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Method of forming single-crystalline thin film

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
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Method of forming single-crystalline thin film

Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Coating
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Oxide superconducting film manufacturing apparatus

Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to condition of coating material
Patent

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Oxide superconducting film manufacturing apparatus

Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to condition of coating material
Patent

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Profile ID: LFUS-PAI-P-552029

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