Method of forming single-crystalline thin film

Details Method of forming single-crystalline thin film Method of forming single-crystalline thin film

1995-02-24

1997-03-04

Kunemund, Robert

Superconductor technology: apparatus, material, process

Processes of producing or treating high temperature...

Coating

505732, 20429813, 117944, C30B 2308, C30B 2506

Patent

active

056078994

ABSTRACT:
A thin film strongly orienting specific crystal axes is deposited on a polycrystalline or amorphous base material in accordance with laser deposition in a simpler device through a simpler process. A target is irradiated with a laser beam, for forming a thin film in accordance with laser ablation of depositing a substance scattered from the target on a base material. In order to form the thin film, prepared are conditions capable of forming a film orienting a specific crystal axis substantially perpendicularly to the base material in substantially parallel arrangement of the target and the base material. Under the conditions, a film is deposited on the base material which is inclined at a prescribed angle .theta. with respect to the target. It is possible to deposit a film strongly orienting a specific crystal axis in a plane substantially parallel to the base material surface by inclining the base material under the specific film forming conditions.

REFERENCES:
patent: 5037521 (1991-08-01), Nishikawa et al.
patent: 5159169 (1992-10-01), Nishikawa et al.
patent: 5231075 (1993-07-01), Nagaishi et al.
patent: 5242706 (1993-09-01), Cotell et al.
Proceedings for 49th Teionkougaku Choudendou Gakkai, Spring 1993, p. 134 (with English Translation).
Yu et al. "Control of thin film orientation by glancing angle ion bombardment during growth" J. Vac. Sci. Technol. A4(3), p. 443, May/Jun. 1986.

Affiliated with

Also associated with

Rating

Method of forming single-crystalline thin film does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of forming single-crystalline thin film, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of forming single-crystalline thin film will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2145910