Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to condition of coating material
Patent
1993-07-26
1996-02-06
Housel, James C.
Coating apparatus
Control means responsive to a randomly occurring sensed...
Responsive to condition of coating material
118 501, 118620, 118690, 118691, 20419224, 20429802, C23C 1428
Patent
active
054893380
ABSTRACT:
An apparatus for manufacturing an oxide superconducting film employing laser ablation method having a thin film forming chamber having a laser-transparent laser entrance window, a target being provided in the thin film forming chamber and containing components of an oxide superconductor, a laser beam source for irradiating the target with a laser beam from the exterior of the thin film forming chamber through the laser entrance window, and a controller for controlling power of the laser beam which is applied to the target for preventing the power of the laser beam, being applied to the target, from reduction by contamination of the entrance window caused by scattered particles. According to the present invention, it is possible to form an oxide superconducting film having high and uniform characteristics even if a long time is required for film formation, thereby attaining a remarkable effect in improvement of superconductivity of a large area oxide superconducting film.
REFERENCES:
patent: 4265932 (1981-06-01), Peters et al.
patent: 4837044 (1989-06-01), Murarka et al.
patent: 5017277 (1991-06-01), Yoshida et al.
2318a Applied Physics A, Spreinger-Verlag 1989, "Laser-Induced Formation and Surface Processing of High-Temperature Superconductors", D. Bauerle, pp. 527-541 (1989).
Applied Physics Letters, 52 (1988) 20 Jun. 1988, "Plasma emission from laser ablation of the high-temperature superconductor YBa.sub.2 Cu.sub.3 O.sub.7 ", Wayne A. Weimer, pp. 2171-2173.
Fujino Kousou
Hara Tsukushi
Ishii Hideo
Takano Satoshi
Yoshida Noriyuki
Housel James C.
Ludlow Jan M.
Sumitomo Electric Industries Ltd.
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