4. Organic compounds -- part of the class 532-570 series
  5. Organic compounds
  6. Carbohydrates or derivatives

Koji Hasegawa

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(Meth)acrylates having lactone structure, polymers,...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Acetal compound, polymer, resist composition and patterning...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Acetal compound, polymer, resist composition and patterning...

Organic compounds -- part of the class 532-570 series – Organic compounds – Heterocyclic carbon compounds containing a hetero ring...
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Acid-decomposable ester compound suitable for use in resist...

Organic compounds -- part of the class 532-570 series – Organic compounds – Cyclopentanohydrophenanthrene ring system containing
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Basic compound, resist composition and patterning process

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Profile ID: LFUS-PAI-P-853190

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