4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Klaus Drews

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Device for coating a substrate by means of plasma-CVD or cathode

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent

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Device for coating a substrate by means of plasma-CVD or cathode

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Substrate holder for etching thin films

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Profile ID: LFUS-PAI-P-416070

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