4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Klaus Dietrich Beyer

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Method for fabricating semiconductor devices

Metal treatment – Compositions – Heat treating
Patent

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Method for removing crevices induced by chemical-mechanical poli

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Shallow trench isolation structure for strained Si on SiGe

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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SOI transistor having a self-aligned body contact

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent

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SOI transistor having a self-aligned body contact

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent

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Profile ID: LFUS-PAI-P-873391

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