4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Surface condition

Kla-Tencor Technologies Corporation

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Apparatus and methods for detecting overlay errors using...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Defect detection system

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Methods and apparatus for inspecting a sample

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Systems and methods for a wafer inspection system using...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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