Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2007-10-09
2007-10-09
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
Reexamination Certificate
active
10785723
ABSTRACT:
Disclosed is a method of determining an overlay error between two layers of a multiple layer sample. For each of a plurality of periodic targets that each have a first structure formed from a first layer and a second structure formed from a second layer of the sample, a first optical signal is measured using a first ellipsometer or a first reflectometer and a second optical signal is measured using a second ellipsometer or a second reflectometer. There are predefined offsets between the first and second structures. An overlay error is determined between the first and second structures by analyzing the measured first and second optical signals from the periodic targets using a scatterometry overlay technique based on the predefined offsets.
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Adel Michael E.
Bareket Noah
Fielden John
Friedmann Michael
Ghinovker Mark
Kla-Tencor Technologies Corporation
Stock, Jr. Gordon J.
Toatley , Jr. Gregory J.
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