4. Optics: measuring and testing
  5. Standard
  6. Surface standard

KLA-Tencor Technologies

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Apparatus and method for applying feedback control to a...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Broadband wavelength selective filter

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
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Chemical analysis of defects using electron appearance...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Method of detecting the thickness of thin film disks or wafers

Optics: measuring and testing – Dimension – Thickness
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Methods and systems for determining a characteristic of a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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