Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2005-09-20
2005-09-20
Smith, Matthew (Department: 2825)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S014000, C438S016000, C356S072000, C356S237200, C356S237300, C356S600000, C356S630000, C356S632000, C356S636000
Reexamination Certificate
active
06946394
ABSTRACT:
Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The measurement device may include an illumination system and a detection system. The illumination system and the detection system may be configured such that the system may be configured to determine multiple properties of the specimen. For example, the system may be configured to determine multiple properties of a specimen including, but not limited to, a characteristic of a layer formed on a specimen by a deposition process. In this manner, a measurement device may perform multiple optical and/or non-optical metrology and/or inspection techniques.
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Brown Kyle A.
Bultman Gary
Fielden John
Levy Ady
Nikoonahad Mehrdad
Daffer McDaniel LLP
KLA-Tencor Technologies
Lee, Jr. Granvill D.
Mewherter Ann Marie
Smith Matthew
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