Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Reexamination Certificate
2007-12-04
2007-12-04
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
C356S328000
Reexamination Certificate
active
11096448
ABSTRACT:
An optical filter for the selective attenuation of specific wavelengths of light includes at least one spectrally dispersive element, such as a diffraction grating or prism, in combination with an optical filter. A dispersive element separates broadband light into a constituent wavelength spread in angle space. An optical filter, or filter array, can block and/or attenuate specific wavelengths or wavelength ranges of interest while the light is angularly dispersed. A second dispersive element can recombine this filtered, separated wavelength fan of light into a coaxial broadband beam having a smoother intensity profile than the unfiltered beam.
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Hendrix James L.
Norton Adam E.
Wang David Y.
Giesel Kara
KLA-Tencor Technologies
Stallman & Pollock LLP
Toatley , Jr. Gregory J.
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