4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Kiyoshi Nashimoto

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Apparatus for controlling temperature in the processing of a sub

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Electrostatic chuck and substrate processing apparatus

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Method of and apparatus for controlling temperature in the proce

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Method of depositing thin films by plasma-enhanced chemical vapo

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Profile ID: LFUS-PAI-P-143324

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