Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
Inventor
active
Controlled gas supply line apparatus and process for infilm...
Design for sputter targets to reduce defects in refractory metal
Magnet assembly for enhanced sputter target erosion
Method and apparatus for reducing wafer to wafer deposition...
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Profile ID: LFUS-PAI-P-511857