4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Kin-Chan Chen

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3D lithography with laser beam writer for making hybrid...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Abrasives for chemical mechanical polishing

Compositions – Etching or brightening compositions
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Abrasives for chemical mechanical polishing

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Adsorption based material removal process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Advanced control for plasma process

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Profile ID: LFUS-PAI-P-207289

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