4. Optics: measuring and testing
  5. By configuration comparison
  6. With comparison to master, desired shape, or reference voltage

Kiminobu Akeno

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Alignment apparatus for substrates

Data processing: generic control systems or specific application – Specific application – apparatus or process – Robot control
Reexamination Certificate

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Alignment method

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Charged particle beam system and chamber of charged particle...

Radiant energy – Irradiation of objects or material
Reexamination Certificate

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Pattern evaluation apparatus and a method of pattern evaluation

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
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Profile ID: LFUS-PAI-P-561478

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