Alignment apparatus for substrates

Details Alignment apparatus for substrates Alignment apparatus for substrates

2005-05-31

2005-05-31

Black, Thomas G. (Department: 3661)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Robot control

C700S246000, C700S258000, C700S302000, C250S491100

Reexamination Certificate

active

06901314

ABSTRACT:
An alignment apparatus for substrates comprises a first movement mechanism moving a substrate to be treated in a horizontal direction, a second movement mechanism moving the substrate in a vertical direction, a rotation mechanism rotating the substrate in a substrate plane, an illumination tool irradiating the substrate from a sidewise direction in a state where the substrate is held in a desired height position by the second movement mechanism, an image sensor picking up an image on a back surface of the substrate in an irradiated state, an edge position sensor sensing plural edge positions of the substrate from an image obtained by the image sensor, and a control computer obtaining a positional shift of the substrate based on the edge positions sensed by the edge position sensor and correcting a positional shift of the horizontal and rotation directions by the first movement and rotation mechanisms.

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