4. Abrasive tool making process, material, or composition
  5. With inorganic material
  6. Metal or metal oxide

Kim-Chan Chen

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Catalytic acceleration and electrical bias control of CMP proces

Abrasive tool making process – material – or composition – With inorganic material – Metal or metal oxide
Patent

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Low defect density vacancy dominated silicon

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth with a subsequent step of heat treating...
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Method for etching passivation layer of wafer

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Method of manufacturing a semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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