4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Kevin James Torek

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Method for selective etching of anitreflective coatings

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Patent

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Method for selective etching of antireflective coatings

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Patent

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Method for selective etching of antireflective coatings

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Methods and etchants for etching oxides of silicon with low sele

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Selective etching of oxides

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Profile ID: LFUS-PAI-P-1321608

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