4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Kevin Donohoe

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Control of etch profiles during extended overetch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Magnetically enhanced plasma reactor system for semiconductor pr

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Method of high density plasma etching for semiconductor manufact

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Use of a chemically active reticle carrier for photomask...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate

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Use of a chemically active reticle carrier for photomask...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1478420

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