4. Heating
  5. Work feeding, agitating, discharging or conveying...
  6. Removable furnace bottom section or kiln cart

Kenji Tago

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Heat treatment apparatus

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent

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Processing apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Thin film forming apparatus cleaning method

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Reexamination Certificate

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Wafer boat and film formation method

Coating apparatus – Work holders – or handling devices
Patent

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Wafer boat and film formation method

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-634798

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