4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Kenichi Koyanagi

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ALD process for capacitor dielectric

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate

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Heat treatment of a tantalum oxide film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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High density plasma enhanced chemical vapor deposition method

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Memory with memory cells that include a MIM type capacitor...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Method for forming a metal oxide film

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Profile ID: LFUS-PAI-P-581377

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