4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Ken-ichi Aketagawa

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Thin film deposition method

Fishing – trapping – and vermin destroying
Patent

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Thin film deposition method for wafer

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With a step of measuring – testing – or sensing
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Vacuum deposition apparatus with dust collector electrode

Coating apparatus – Gas or vapor deposition – With treating means
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Vacuum film forming apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Profile ID: LFUS-PAI-P-914992

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