Elimination of photo-induced electrochemical dissolution in chem

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means

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438692, 118715, 451 66, C23F 102

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active

061530433

ABSTRACT:
Eliminating exposure of PN junctions to light capable of invoking a photovoltaic effect and/or inhibiting the oxidation and reduction reactions induced by the photovoltaic effect prevents the electrochemical dissolution of metal components on semiconductor devices by electrolysis. A darkened enclosure for use on tools for wafer CMP, brush cleaning, unloading, and rinsing will eliminate exposure. Alternatively, illumination of a semiconductor wafer can be limited to wavelengths of light that do not provide enough energy to induce a photovoltaic effect. An inhibitor in the CMP slurry and/or post-CMP water rinse blocks the oxidation and/or reduction reactions. A blocking agent, such as a high molecular weight surfactant, will interfere with both the oxidation and reduction reactions at the metal surface. Also, a poisoning agent will impede the reduction portion of electrolysis.

REFERENCES:
patent: 5084071 (1992-01-01), Nenadic et al.
patent: 5139571 (1992-08-01), Deal et al.
patent: 5144498 (1992-09-01), Vincent
patent: 5340370 (1994-08-01), Cadien et al.
patent: 5480748 (1996-01-01), Bakeman, Jr. et al.
patent: 5527423 (1996-06-01), Neville et al.
patent: 5575837 (1996-11-01), Kodama et al.
patent: 5931723 (1999-08-01), Katsuoka et al.

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