4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Kazuyuki Toyoda

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Apparatus and method for use in manufacturing a...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Apparatus and method for use in manufacturing a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Batch-type remote plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Batch-type remote plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Production method for semiconductor device

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Profile ID: LFUS-PAI-P-1154786

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