4. Brushing, scrubbing, and general cleaning
  5. Electrostatic cleaning

Kazuyuki Ikenaga

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Cleaning apparatus

Brushing – scrubbing – and general cleaning – Electrostatic cleaning
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Plasma processing apparatus

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Plasma processing apparatus and plasma processing method

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Plasma processing method and apparatus using dynamic sensing...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Plasma-assisted processing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
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Profile ID: LFUS-PAI-P-2299867

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