Cleaning apparatus

Details Cleaning apparatus Cleaning apparatus

2011-08-30

2011-08-30

Karls, Shay (Department: 3723)

Brushing, scrubbing, and general cleaning

Electrostatic cleaning

C015S001000

Reexamination Certificate

active

08006340

ABSTRACT:
The invention provides a cleaning apparatus for removing particles attached to the fine roughness on the surface of an insulating body coated on the metal surface of a vacuum processing apparatus. The present cleaning apparatus comprises an adhesive sheet5having a base material51and an adhesive surface52, a conductive sheet7in contact with the base material51, and a pressing member11for pressing the conductive sheet7onto the adhesive sheet5, a voltage applying mechanism9for applying positive or negative voltage to the conductive sheet7, and a pressing force controlling mechanism8for pressing the adhesive sheet5onto the curved surface10of the vacuum processing apparatus, wherein the pressing member11presses the conductive sheet7and the adhesive sheet5by a pressing force controlled via the pressing force controlling mechanism8in order to closely adhere the adhesive surface52of the adhesive sheet5to the curved surface of the insulating body10so as to remove particles attached to the insulating body10, and positive or negative voltage is applied to the conductive sheet7to generate electrostatic attraction force so as to attract and remove particles attached to the insulating body10.

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