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Kazuaki Suzuki

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Apparatus and method for controlling scanning exposure of photos

Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent

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Apparatus for detecting positions of marks in projection aligner

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Charged particle beam transfer mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Charged-particle-beam microlithography apparatus and methods...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Charged-particle-beam microlithography methods exhibiting...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Reexamination Certificate

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Profile ID: LFUS-PAI-P-94798

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