Apparatus and method for controlling scanning exposure of photos

Details Apparatus and method for controlling scanning exposure of photos Apparatus and method for controlling scanning exposure of photos

1998-03-30

2000-08-15

Mathews, Alan A.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 355 68, 355 77, G03B 2742, G03B 2772, G03B 2774, G03B 2732

Patent

active

061044741

ABSTRACT:
An exposure amount control device for controlling an integrated exposure amount of pulsed light to a photosensitive substrate within a predetermined range in which a pattern of a mask is successively exposed on the substrate by synchronously scanning the mask forming the pattern to be exposed and the photosensitive substrate relatively with respect to a predetermined illumination area illuminated with pulsed light from a pulsed light source, satisfies the following relationship:

REFERENCES:
patent: 3538828 (1970-11-01), Genovese
patent: 4822975 (1989-04-01), Torigoe
patent: 4924257 (1990-05-01), Jain
patent: 4970546 (1990-11-01), Suzuki et al.
patent: 5053614 (1991-10-01), Yui et al.
patent: 5097291 (1992-03-01), Suzuki
patent: 5191374 (1993-03-01), Hazama et al.
patent: 5194893 (1993-03-01), Nishi
patent: 5250797 (1993-10-01), Sano et al.
patent: 5281996 (1994-01-01), Bruning et al.
patent: 5289231 (1994-02-01), Magome et al.
patent: 5343270 (1994-08-01), Sakakibard et al.
patent: 5473410 (1995-12-01), Nishi
patent: 5473412 (1995-12-01), Ozawa
patent: 5777724 (1998-07-01), Suzuki
SPIE, vol. 922, Optical/Laser Micro Lithography (1988) pp. 437-443.

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