4. Illumination
  5. Light modifier
  6. Refractor

Kayo Sugiyama

Inventor

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Exposure apparatus and methods for using the same

Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent

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Illumination optical apparatus and semiconductor device manufact

Illumination – Light modifier – Refractor
Patent

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Illumination optical system, an exposure apparatus having the il

Optical: systems and elements – Single channel simultaneously to or from plural channels
Patent

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Profile ID: LFUS-PAI-P-802120

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