Illumination optical system, an exposure apparatus having the il

Details Illumination optical system, an exposure apparatus having the il Illumination optical system, an exposure apparatus having the il

1997-02-21

1999-02-02

Epps, Georgia

Optical: systems and elements

Single channel simultaneously to or from plural channels

362268, G02B 2710, F21V 2900

Patent

active

058673199

ABSTRACT:
A change in the optical characteristics which is caused by an unevenness of the intensity of illumination, following a change of the form or the size of a multiple light source, is corrected by an adjustment mechanism with a simple structure. This mechanism further comprises a first correction device (21, 14B) which corrects unevenness of the intensity of illumination generated on a plane to be irradiated due to a change of the form and the size of the multiple light source made by a change device(13), and a second correction device (22, 14A1) which corrects at least one of a change of the back focus of a condenser optical system and a change in the telecentricity of the illumination light on the irradiated plane caused due to a correcting operation of the first correction device.

REFERENCES:
patent: 4947030 (1990-08-01), Takahashi
patent: 5237367 (1993-08-01), Kudo

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