Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent
1997-12-12
1999-10-05
Metjahic, Safet
Photocopying
Projection printing and copying cameras
Illumination systems or details
355 53, G03B 2754, G03B 2742
Patent
active
059633069
ABSTRACT:
Projection-exposure photolithography apparatus are disclosed that include a light source supported by a first structural body, an illumination optical system that is supported by a second structural body isolated from the first structural body, a first light-collecting system supported by the first structural body, and a second light-collecting system supported by the second structural body. The illumination optical system includes, at its incident side, a surface conjugate to a mask defining a mask pattern. Light reaches the incident surface from the second light-collecting system. The apparatus is arranged such that a prescribed surface and the exit plane of the light source are optically conjugate relative to each other by way of the first light-collecting system and the second light-collecting system.
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Sugiyama Kayo
Tanitsu Osamu
Metjahic Safet
Nguyen Hung Henry
Nikon Corporation
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