4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Kathryn H. Varian

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CMP pad maintenance apparatus and method

Abrading – Abrading process – Utilizing fluent abradant
Patent

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Fill strategies in the optical kerf

Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
Reexamination Certificate

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Planarization of a non-conformal device layer in semiconductor f

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Patent

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Planarization of a non-conformal device layer in semiconductor f

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Patent

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Vertical thermal nitride mask (anti-collar) and processing...

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1055774

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