4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Karen Irma Josef Maex

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CoSi.sub.2 salicide method

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Etching process of CoSi.sub.2 layers

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent

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Etching process of CoSi2 layers

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1638564

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