4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Pretreatment of substrate or post-treatment of coated substrate

Kang Sub Yim

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Hermetic cap layers formed on low-κ films by plasma...

Coating apparatus – Program – cyclic – or time control – Having prerecorded program medium
Reexamination Certificate

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Hermetic cap layers formed on low-k films by plasma enhanced...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Low dielectric (low k) barrier films with oxygen doping by...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Low dielectric (low k) barrier films with oxygen doping by...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Low dielectric (low k) barrier films with oxygen doping by...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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