4. Chucks or sockets
  5. With fluid-pressure actuator
  6. Socket type

Kabushiki Kaisha Tokuda Seisakusho

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Apparatus for producing semiconductor devices

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Dry etching method

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Electrostatic chuck

Chucks or sockets – With fluid-pressure actuator – Socket type
Patent

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Magnet driving method and device for same

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Sputter-etching device

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-222887

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