Magnet driving method and device for same

Details Magnet driving method and device for same Magnet driving method and device for same

1985-07-24

1986-07-15

Demers, Arthur P.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

156345, 156643, 204192E, 204192EC, C23C 1500

Patent

active

046004920

ABSTRACT:
A plurality of bar-like magnets are arranged in a vacuum chamber at an equal space interval to form a plurality of strong magnetic fields in a stripe-pattern form and the magnets are moved reciprocally in the direction of arrangement of the magnetic fields while changing gradually the stop points of the magnets over a work to be processed by etching or sputtering in a step-like manner so that the integral effect of each magnetic field acting on the work is uniform over the entire region of the work.

REFERENCES:
patent: 4309266 (1982-01-01), Nakamura et al.
patent: 4422916 (1983-12-01), McKelvey
patent: 4426264 (1984-01-01), Munz et al.
patent: 4431473 (1984-02-01), Okano et al.
patent: 4444635 (1984-04-01), Kobayashi et al.
patent: 4498969 (1985-02-01), Ramachandran
patent: 4544468 (1985-10-01), Munz et al.
patent: 4552639 (1985-11-01), Garrett

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