Electrostatic chuck

Details Electrostatic chuck Electrostatic chuck

1985-07-30

1987-02-24

Weidenfeld, Gil

Chucks or sockets

With fluid-pressure actuator

Socket type

269 8, 269 13, 361145, 361234, B25B 1100

Patent

active

046452184

ABSTRACT:
An electrostatic chuck for holding a work by electrostatic forces, which has an electrostatic attraction body for attracting the work, an electrostatic conductive support body for supporting the electrostatic attraction body, channels for passing cooling medium therethrough and cover means for covering the exposed surfaces of the support body except a portion thereof over which the work is placed. This chuck can not only prevent impure matters from generating from the surfaces of the support body but also prevent damages due to heat.

REFERENCES:
patent: 4184188 (1980-01-01), Briglia
patent: 4384918 (1983-05-01), Abe
patent: 4502094 (1985-02-01), Lewin et al.
patent: 4554611 (1985-11-01), Lewin

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