4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Altering etchability of substrate region by compositional or...

Jyoti Kiron Bhardwaj

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Chlorotrifuorine gas generator system

Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – With means applying electromagnetic wave energy or...
Reexamination Certificate

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Compact, low insertion loss, high yield arrayed waveguide...

Optical waveguides – With optical coupler – Input/output coupler
Reexamination Certificate

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Gas delivery system

Etching a substrate: processes – Etching and coating occur in the same processing chamber
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Gas generation system

Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Waste gas purifier
Reexamination Certificate

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Method and apparatus for anisotropic etching

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Profile ID: LFUS-PAI-P-1962596

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