Gas generation system

Details Gas generation system Gas generation system

2005-08-09

2005-08-09

Elve, M. Alexandra (Department: 1725)

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Waste gas purifier

C422S168000, C422S169000

Reexamination Certificate

active

06926871

ABSTRACT:
A gas generator system is provided wherein supply sources for halogenated gases, including pure molecular halogens, are connected into a gas reaction chamber, or chamber system, to enable generation of a predetermined gas for localized use in a subsequent process. The reaction chamber has a valved outlet for direct supply of the generated gas to a single or multiple chamber processing tool or process chamber. Thus it is possible, for example, to provide for the localized generation of reactive process gases.

REFERENCES:
patent: 5688384 (1997-11-01), Hodgson et al.
patent: 6079426 (2000-06-01), Subrahmanyam et al.
patent: 0150285 (1985-08-01), None
patent: 02230720 (1990-09-01), None
patent: WO98/27005 (1998-06-01), None
patent: WO99/07919 (1999-02-01), None

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