4. Cleaning and liquid contact with solids
  5. Processes
  6. Including application of electrical radiant or wave energy...

Jung-Hui Kao

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Contact scheme for MOSFETs

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Method for semiconductor device performance enhancement

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Ozone vapor clean method

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Simplified method for cleaning silicon wafers after...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Simplified method for cleaning silicon wafers after...

Cleaning and liquid contact with solids – Apparatus – Electrically controlled
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Profile ID: LFUS-PAI-P-2065322

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