4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

June Cline

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Deep trench formation in semiconductor device fabrication

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Deep trench formation in semiconductor device fabrication

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Measurement to determine plasma leakage

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2929266

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