4. Semiconductor device manufacturing: process
  5. Formation of semiconductive active region on any substrate
  6. On insulating substrate or layer

Julio J. Maldonado

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Adhesion improvement for low k dielectrics to conductive...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Air gap interconnect structure and method thereof

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Alloyed underlayer for microelectronic interconnects

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Apparatus and method for depositing superior Ta (N) copper...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Apparatus and methods for monitoring self-aligned contact...

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
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