4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Jui-Cheng Lo

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Dual mode hybrid control and method for CMP slurry

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Low charge-up reactive ion metal etch process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Method for controlling etch bias in plasma etch patterning of in

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Method to solve alignment mark blinded issues and technology...

Chemical apparatus and process disinfecting – deodorizing – preser – Control element responsive to a sensed operating condition
Reexamination Certificate

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Slurry flow control and monitor system for chemical...

Pumps – Condition responsive control of pump drive motor – Responsive to change in rate of pump fluid flow
Reexamination Certificate

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Profile ID: LFUS-PAI-P-276138

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