4. Measuring and testing
  5. Speed, velocity, or acceleration
  6. Acceleration determination utilizing inertial element

Juha Lahdenperä

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Capacitive acceleration sensor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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Method for manufacturing a silicon sensor and a silicon sensor

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Method for reducing the temperature dependence of a...

Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specified electrical sensor or system
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Profile ID: LFUS-PAI-P-2815213

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