Method for reducing the temperature dependence of a...

Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specified electrical sensor or system

Reexamination Certificate

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Reexamination Certificate

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10503089

ABSTRACT:
A method of manufacturing a sensor including forming an insulating layer on top of a conductive substrate, and forming a conducting electrode on top of the insulating layer. Further, the insulating layer is formed to include support areas formed at edges of the conducting electrode and a partial area formed under the conducting electrode, and a thickness (d2) of the partial area of the insulating layer is less than a thickness (d1) of the support areas of the insulating area.

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patent: 41 36 995 (1993-05-01), None
patent: 196 40 960 (1998-04-01), None
patent: WO-00/2028 (2000-01-01), None

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